大口径辅助阳极型辉光放电溅射源的设计与研究

doi:10.3964/j.issn.1000-0593(2024)06-1640-08

Abstract
References
Related Citation (15)

Download: PDF (26170 KB)
Export: BibTeX | EndNote (RIS)

Abstract Glow discharge atomic emission spectroscopic analysis technology can analyze and characterize the surface of metal samples layer by layer along the depth direction, and the glow discharge emission source has the advantages of a fast sputtering rate, high analysis efficiency, and large-area sputtering. In addition, the glow discharge plasma energy is low. The layer-by-layer sputtering excitation process of the material will not cause changes in the structure of the material itself. The sample preparation can be achieved layer by layer along the sample depth direction. Combining a glow discharge sputtering source with a scanning electron microscope, spectral analysis, and detection instrument can be used as an effective means for high-through put quantitative characterization of metal materials. It is necessary to perform glow discharge plasma sputtering on the material surface under multi-size and large-area sputtering conditions. Therefore, based on the traditional glow sputtering source, this paper improves the structure of the anode cylinder, designs four kinds of large-diameter anodes with diameters of 15, 20, 30, and 40 mm respectively, and carries out COMSOL numerical simulation and actual study on sputtering effect. Large-size sputtering surface can obtain richer information on the surface of the material. However, under the same sputtering conditions, the increase of the anode diameter will also lead to a decrease in the sputtering rate, a decrease in the ionization rate of the central area of the sputtering surface, and affect the sputtering uniformity, pit flatness, and other issues. To solve these problems, an auxiliary anode structure that can be applied to a large-aperture DC glow discharge sputtering source is designed in this paper. Changing the electric field distribution in the discharge space regulates the plasma distribution in the discharge space, and the electron ionization rate in the central area of the anode is enhanced. In this paper, the design principle of the auxiliary anode structure is explained in detail, and the numerical simulation research and the actual sputtering effect comparison experiment are carried out on the traditional anode cylinder and the auxiliary anode. The results show that the addition of auxiliary anodes has a significant effect on the sputtering rate of large-diameter sputtering sources. The sputtering rate of sources with an anode diameter of 30mm is increased by 33%~48%, and the sputtering rate of sputtering sources with an anode diameter of 40mm is increased by 34%~57%. The sputtering excitation of copper samples was carried out using a large-aperture auxiliary anode sputtering source, and the sputtering crater morphology was tested by optical coherence tomography (OCT). The results show that adding an auxiliary anode can effectively improve the sputtering uniformity and flatness of the sputtering crater. The actual measurement data are given in this paper.

Key words：Glow discharge; High throughput characterization; Large aperture sputtering source; Sputtering rate; Sputtering crater morphology

Received: 2023-03-20 Accepted: 2023-08-21

ZTFLH:

O657.31

Corresponding Authors: SHI Ning, WANG Yong-qing E-mail: shiningzhongguo@126.com; 125254397@qq.com

Cite this article:

WAN Zhen-zhen,WU Jia,SHI Ning, et al. Design and Research of Glow Discharge Excitation Source With Large Aperture Auxiliary Anode[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2024, 44(06): 1640-1647.

URL:

https://www.gpxygpfx.com/EN/10.3964/j.issn.1000-0593(2024)06-1640-08 OR https://www.gpxygpfx.com/EN/Y2024/V44/I06/1640

[1] YU Wei-hua, LI Jie, ZHENG Feng, et al(余卫华, 李杰, 郑凤, 等). Metallurgical Analysis(冶金分析), 2021, 41(12): 68.
[2] WAN Zhen-zhen, ZHANG Chuang, FU Xin-xin, et al(万真真, 张闯, 付新新, 等). High Voltage Engineering(高电压技术), 2020, 46(2): 709.
[3] Lanzutti A, Andreatta F, Magnan M, et al. Surface and Interface Analysis, 2019, 51(12): 1165.
[4] HU Wei-zhu, CHEN Yu, MU Ying-hua, et al(胡维铸, 陈宇, 牟英华, 等). Metallurgical Analysis(冶金分析), 2021, 41(5): 28.
[5] Yang L, Yuan Y, Liu J W, et al. Vacuum, 2021, 191: 110358.
[6] Al Quysi H T, Hamad T, Al Zubaidy T L. Bulletin of Materials Science, 2023, 46(3): 135.
[7] NCS Testing Technology Co., Ltd.(钢研纳克检测技术股份有限公司). Large-Scale High-Throughput Quantitative Characterization Device and Method for Three-Dimensional Reconstruction of Material Microstructure(材料组织结构大尺寸高通量定量表征三维重构设备和方法). Chinese Patent(中国专利): CN109884104B, 2020.
[8] GUAN Hong-da, LI Cai-ju, GAO Peng, et al(关洪达, 李才巨, 高鹏, 等). Rare Metal Materials and Engineering(稀有金属材料与工程科技导报), 2019, 48(12): 4131.
[9] WU Sheng-chuan, WU Zheng-kai, KANG Guo-zheng, et al(吴圣川, 吴正凯, 康国政, 等). Journal of Mechanical Engineering(机械工程学报), 2021, 57(16): 37.
[10] Wang H Z, Zhao L, Jia Y H, et al. Engineering, 2020, 6(6): 621.
[11] WAN Zhen-zhen, FU Xin-xin, WANG Yong-qing, et al(万真真, 付新新, 王永清, 等). High Voltage Engineering(高电压技术), 2018, 44(6): 1946.
[12] Zhang X Y, Kazuaki W. ISIJ International, 2020, 60(3): 610.
[13] LIU Zhuang, CHI Chen-yang, GUO Fan, et al(刘壮, 迟晨阳, 郭帆, 等). Digital Printing(数字印刷), 2021，(6): 89.
[14] Hebei University(河北大学). Composite Removable Anode Cylinder and Cathode Disk Structure for Glow Discharge Sputtering Sources(用于辉光溅射源的复合可拆卸阳极筒及阴极盘结构). Chinese Patent(中国专利): CN217359614U, 2022.