1. 可再生能源材料先进技术与制备教育部重点实验室，云南 昆明 650092 2. 云南师范大学太阳能研究所，云南 昆明 650092 3. Wright Center for Photovoltaic Innovation and Commercialization, Department of Physics and Astronomy, the University of Toledo, 43606, USA
Research on the Phase and Optical Properties of nc-Si Films Prepared by Low Temperature Aluminum Induced Crystallization
DUAN Liang-fei1, 2, YANG Wen1, 2 , YANG Pei-zhi1, 2*, ZHANG Li-yuan1, 2, SONG Zhao-ning3
1. Key Laboratory of Renewable Energy Advanced Materials and Manufacturing Technology of Ministry of Education of China, Kunming 650092, China 2. Solar Energy Research Institute, Yunnan Normal University, Kunming 650092, China 3. Wright Center for Photovoltaic Innovation and Commercialization, Department of Physics and Astronomy, the University of Toledo, 43606, USA
Abstract：In the present paper, nanocrystalline silicon thin films on glass substrates were prepared by rapid thermal annealing (RTA) of RF magnetron sputtered system and α-Si/Al films at a low temperature in N2 atmosphere. Optical metallographic microscope, confocal optical microscopy, X-ray diffractometer, Raman scattering and UV-Vis-NIR spectrometers were used to characterize the surface morphology and the phase and optical properties of nc-Si films. The influence of annealing process on the nc-Si films properties was studied. The results showed that nc-Si films were obtained after aluminum induced crystallization of the α-Si/Al films at 300 ℃, withthe crystallization rate 15.56% and the grain size 1.75 nm. The surface uniformity and lattice distortion of nc-Si films reduced, while grain size, degree of crystallization and the optical band gap of the films increased with increasing annealing temperature from 300 to 400 ℃. As the annealing temperature increased from 400 to 500 ℃, although the degree of crystallization and grain size increased, the tendencies of all other characteristics were opposite. On the contrary, the surface uniformity and the lattice distortion increased, but the optical band gap of nc-Si films reduced. The optical properties of the resulting films were confirmed by the absorption model of nc-Si thin films, where the tendency of band gap changes is in consistent with the optical modeling.
段良飞1, 2，杨 雯1, 2，杨培志1, 2*，张力元1, 2，宋肇宁3 . 低温铝诱导晶化制备纳米晶硅薄膜的物相和光学性能研究 [J]. 光谱学与光谱分析, 2014, 34(08): 2169-2174.
DUAN Liang-fei1, 2, YANG Wen1, 2 , YANG Pei-zhi1, 2*, ZHANG Li-yuan1, 2, SONG Zhao-ning3 . Research on the Phase and Optical Properties of nc-Si Films Prepared by Low Temperature Aluminum Induced Crystallization . SPECTROSCOPY AND SPECTRAL ANALYSIS, 2014, 34(08): 2169-2174.
[1] Ling Z P, Ge J, Mueller T. Energy Procedia，2012, 15(1): 118. [2] LUO Shi-yu, FENG Lei, WANG Hou(罗士雨，冯 磊，汪 洪). Journal of Synthetic Crystals(人工晶体学报), 2008, 37(8): 1191. [3] PENG Ding-kun, WANG Chun-lin, MENG Guang-yao(彭定坤，王春林，孟广耀). Journal of Inorganie Materials(无机材料学报), 1992, 33(2): 17. [4] ZHANG Liang-yan, LIN Zu-lun, QI Kang-cheng(张良燕，林祖伦，祁康成). Chinese Journal of Electron Devices(电子器件), 2010, 33(1): 12. [5] RAO Rui, XU Zhong-yang, ZENG Xiang-bin(饶 瑞，徐重阳，曾祥斌). Piezoelectrcs ＆ Acoustooptics(压电与声光), 2002, 24(3): 230. [6] Ozgenc E, Roger A, Robert B. Thin Solid Films, 2010, 97(7): 180. [7] Hultman L, Robertsson A, Hentzell H T G. Journal Applied Physics, 1987, 62 (9): 3647. [8] Russell S W, Li J, Mayer J W. Journal Applied Physics, 1991, 70(9): 5154. [9] Tu K N. Appl. Phy., 1975, 27(2): 223. [10] WANG Rui-chun, DU Pi-yi, WENG Wen-jian(王瑞春，杜丕一，翁文剑). Chinese Journal of Semiconductors(半导体学报), 2002, 23(10): 1069. [11] LIU En-ke, ZHU Bing-sheng, LUO Jin-sheng(刘恩科，朱秉升，罗晋生). Beijing: Publishing House of Electronics Industry(北京： 电子工业出版社), 2011. 40. [12] RAO Rui, XU Zhong-yang, SUN Guo-cai(饶 瑞，徐重阳，孙国才). Journal of Inorganie Materials(无机材料学报), 2001, 16(4): 688. [13] ZHANG Li-wei, ZHOU Ling-li, LI Rui(张丽伟，周伶俐，李 瑞). Journal of Inorganie Materials(无机材料学报), 2008, 2(23): 369. [14] YU Yuan-gao, HOU Guo-fu, WANG Rui, et al(俞远高，侯国付，王 锐，等). Laser & Optoelectronics Progress(激光与光电子进展), 2006, 43(8): 48. [15] ZHANG Xiao-dan, ZHAO Ying, WEI Chang-chun, et al(张晓丹，赵 颖，魏长春，等). Acta Energiae Solaris Sinica(太阳能学报), 2007, 28(12): 1305. [16] Waman V S, Kamble M M, Pramod M R. Journal of Non-Crystalline Solids, 2011, 357(7): 3616. [17] GUO Li-qiang, DING Jian-ning, YANG Ji-chang(郭立强，丁建宁，杨继昌). Acta Physica Sinica(物理学报), 2010, 59(11): 8184.
