Study on the Deposition and Optical Properties of GaN Films at Quartz Substrate
ZHANG Dong1, ZHAO Yan1*, SONG Shi-wei1, LI Yu-cai1, WANG Jian1, BI Xiao-guo1, GAO Jing2, WANG Chun-sheng2
1. School of Renewable Eneregy, Shenyang Institute of Engineering, Shenyang 110136, China
2. State Grid Liaoning Electric Power Supply Co. Ltd., Shenyang 110004, China
Abstract：The GaN thin film materials are widely used in light-emitting diode (LED), laser diode (LD) and other optoelectronic devices. But the preparation and application of GaN based device depends largely on its manufacturing cost. At present, because the single crystal sapphire crystal substrate has been merited, the GaN film are commonly deposited on the single crystal sapphire substrate to achieve the high quality GaN films. And because single crystal sapphire substrate is expensive, the GaN devices is limited to use. How to directly deposit high quality GaN films on the cheap substrate and which one meets the requirements of the device have becomed the research hotspot. Quartz glass is cheap as the substrate, but it is not crystal, and it is difficult to deposite high quality thin film samples on quartz glass substrate. In this study, the preparation of GaN thin film materials was prepared by using plasma enhanced metal organic chemical vapor deposition method to change the nitrogen reaction source under normal non-stereotyped quartz substrate at the low-temperature deposition. This research adopts the in-situ reflective high energy electron diffraction spectrum (RHEED), X-ray diffraction spectrum (XRD), Transmission Spectra at room temperature (Transmission Spectra) and room TPS to spectroscopy (PL) to analysis the as-grown GaN films. The results show that the as-grown GaN films show the excellent quality crystallization and optical performance under the proper N2 flux deposition parameters.
张 东，赵 琰，宋世巍，李昱材，王 健，毕孝国，高 靖，王春生. 石英衬底上GaN薄膜沉积及其光学性能的研究[J]. 光谱学与光谱分析, 2018, 38(09): 2672-2675.
ZHANG Dong, ZHAO Yan, SONG Shi-wei, LI Yu-cai, WANG Jian, BI Xiao-guo, GAO Jing, WANG Chun-sheng. Study on the Deposition and Optical Properties of GaN Films at Quartz Substrate. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2018, 38(09): 2672-2675.
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