| 光谱学与光谱分析 |
|
|
|
|
|
| Effect of Oxygen Partial Pressure on the Band-Gap of the TiO2 Films Prepared by DC Reactive Sputtering |
| ZHAO Qing-nan1, 2，LI Chun-ling1, 2，LIU Bao-shun1，ZHAO Xiu-jian1 |
1. The Key Laboratory of Silicate Materials Science and Engineering, Ministry of Education, Wuhan University of Technology,Wuhan 430070，China
2. Center for Materials Research and Analysis, Wuhan University of Technology，Wuhan 430070，China |
|
|
|
|
Abstract TiO2 films have been deposited on glass substrates using DC reactive magnetron sputtering at different oxygen partial pressures from 0.10 to 0.65 Pa. The photoluminescence (PL) spectra of the films were recorded. The results of the PL spectra showed that there were three emission peaks at 370，472 and 514 nm for the films sputtered at 0.35 and 0.65 Pa, and there were two peaks at 370 and 490 nm for the films sputtered at 0.10 and 0.15 Pa. The band-gap for the films was 3.35 eV. For the films sputtered at 0.35 and 0.65 Pa there were two defect energy levels at 2.63 and 2.41 eV, corresponding to 0.72 and 0.94 eV below conduction band for the band-gap, respectively. For the films sputtered at 0.10 and 0.15 Pa, there was an energy band formed between 3.12 and 2.06 eV, corresponding to 0.23 and 1.29 eV below the conduction band. With increasing the oxygen partial pressure, the defect energy band changed to two energy levels, and the energy levels nearly disappeared for the film sputtered at 0.65 Pa of oxygen partial pressure.
|
|
Received: 2003-03-26
Accepted: 2003-08-08
|
|
|
|
Corresponding Authors:
ZHAO Qing-nan
|
|
| Cite this article: |
|
ZHAO Qing-nan,LI Chun-ling,LIU Bao-shun, et al. Effect of Oxygen Partial Pressure on the Band-Gap of the TiO2 Films Prepared by DC Reactive Sputtering [J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2004, 24(05): 603-605.
|
|
|
|
| URL: |
|
http://www.gpxygpfx.com/EN/Y2004/V24/I05/603 |
[1] Hoffmann M R, Martin S T, Choi W. Chem. Rev. 1995, 95： 69.
[2] Madhu P，Badrinarayanan S. Thin Solid Films，2000, 358: 122.
[3] Takeda S, Suzuki S, Odaka H et al. Thin Solid Films，2001, 392: 338.
[4] Vancoppenolle V, Jouan P Y. Wautelet M et al. Surface Coat. Technol.，1999, (116-119): 933.
[5] Gouttebaron R, Cornelissen D, Dauchot J P et al. Surf. Interface Anal.，2000, 30: 527.
[6] Michael Gratzel, Heterogeneous Photochemical Electron Transfer. Florida： CRC Press, Inc. Boca Raton, 1989.
[7] Serpone N, Lawless D, Khairutdinov R. J. Pyhs. Chem.，1995, 99: 16646.
[8] FANG Jun-xin，LU Dong(方俊鑫，陆 栋). Solid Physics(固体物理学·下册). Shanghai: Shanghai Scientific and Technologic Press(上海： 上海科学技术出版社)，1981. 123.
|
| [1] |
ZHANG Ao1, ZHANG Chun-mei1, WU Wei-xia1, WANG Duan-yang2, YAO Song-ye1, MENG Tao1*. Study on Dye-Sensitized Solar Cell by Screen Printing[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2021, 41(07): 2321-2324. |
| [2] |
LIAN Jie1, REN Yi-fei2, YANG Rui-qin1*, HAO Hong-xia3. Rapid Detection System of 2,4,6-Trinitrophenol (TNP) Based on Fluorescent Probe[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2020, 40(03): 804-808. |
| [3] |
XIN Chang-chun1, 2, JIA Hui1, 2, 3*, LI Juan1, 2, WEN Hai-tao2, 3, LI Jing-yu2, WANG Jie1, 2, 3. Integrity Detection of Hollow Fiber Membrane Bioreactor Based on Fluorescence Spectrum Response[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2020, 40(01): 125-130. |
| [4] |
FENG Jun-qin1, CHEN Jun-fang1，2* . Effects of Temperature on the Preparation of Al/Zn3N2 Thin Films Using Magnetron Reactive Sputtering [J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2015, 35(08): 2287-2291. |
| [5] |
LI Li-sha1，CUI Hai-ning2*，JIANG Zhen-yi3 . Preparation and Spectroscopy Investigation of Vanadium Oxide Films Deposited by DC Magnetron Sputtering [J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2011, 31(01): 95-99. |
| [6] |
CHEN Zhi-qiang1, 2, CHEN Wen-li1, 2*, YANG Cheng-wei1 . Effects of Exogenous Salicylic Acid on Photosynthesis in Arabidopsis Leaves Based on Fluorescence Spectra and Delayed Fluorescence Technique [J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2009, 29(08): 2208-2212. |
| [7] |
HUANG Zi-yang1, 2, HUANG Jian-dong1, CHEN Nai-sheng1, HUANG Jin-ling1* . Study on UV-Vis Absorption Spectra and Fluorescence Emission Spectra of Sixteen Tetra-Substituted Metallophthalocyanine Complexes [J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2009, 29(05): 1354-1357. |
| [8] |
JIAO Fei, LIAO Cheng, HAN Jun-feng, ZHOU Zhen. Prepareation of Large Area Al-ZnO Thin Film by DC Magnetron Sputtering[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2009, 29(03): 698-701. |
| [9] |
JIA Xiao-yun1,XU Zheng1*, ZHAO Su-ling1,ZHANG Fu-jun1,ZHAO De-wei1,TANG Yu2,LI Yuan1,ZHOU Chun-lan2,WANG Wen-jing2 . Influence of Annealing and Sputtering Ambience on the Photoluminescence of Silicon Nitride Thin Films[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2008, 28(11): 2494-2497. |
| [10] |
ZHENG Huai-li1, 2, YI Qian1, TANG Ming-fang3, LI Hong2 . Study on the Method of Producing Doped Nanometer Thin Films by Microemulsion Based Inorganogels Process and Its Photocatalytic Capability[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2006, 26(11): 2057-2060. |
| [11] |
LI Jie1, ZHOU He-feng1, HAO Yu-ying2，WANG Hua1, LIU Xu-guang3, XU Bing-she1* . Spectral Analysis and Photoluminescence Properties of 1,5-Naphthalene Diamine Derivative[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2006, 26(02): 235-239. |
| [12] |
ZHENG Huai-li1，2，ZHANG Jun-hua1, LI Hong2, LI Zhi-liang1 . Preparation of Fe3+-Doped TiO2 Nanometer Thin Film and Study on Its Photocatalytic Performances [J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2005, 25(12): 2065-2069. |
| [13] |
HUA Nan-ping1, GAN Yu-qin1, XU Jiao-zhen1, ZOU Cui-e1, YANG Ping1, XU Jing-kun2, DU Yu-kou1* . Size Effect of Pt Nanoparticles: a Study of Properties of Pt Loaded TiO2 Thin Film[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2005, 25(11): 1861-1864. |
|
|
|
|
