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SPECTROSCOPY AND SPECTRAL ANALYSIS  2015, Vol. 35 Issue (08): 2287-2291    DOI: 10.3964/j.issn.1000-0593(2015)08-2287-05
光谱学与光谱分析 |
Effects of Temperature on the Preparation of Al/Zn3N2 Thin Films Using Magnetron Reactive Sputtering
FENG Jun-qin1, CHEN Jun-fang1,2*
1. School of Physics and Telecommunications Engineering, South China Normal University, Guangzhou 510631, China2. Research Resources Center, South China Normal University, Guangzhou 510631, China