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SPECTROSCOPY AND SPECTRAL ANALYSIS  2008, Vol. 28 Issue (11): 2494-2497    DOI: 10.3964/j.issn.1000-0593(2008)11-2494-04
光谱学与光谱分析 |
Influence of Annealing and Sputtering Ambience on the Photoluminescence of Silicon Nitride Thin Films
JIA Xiao-yun1,XU Zheng1*, ZHAO Su-ling1,ZHANG Fu-jun1,ZHAO De-wei1,TANG Yu2,LI Yuan1,ZHOU Chun-lan2,WANG Wen-jing2
1. Institute of Optoelectronics Technology, Beijing Jiaotong University, Key Laboratory of Luminescence and Optical Information, Beijing Jiaotong University, Ministry of Education, Beijing 100044,China
2. Institute of Electrical Engineering, Chinese Academy of Sciences,Beijing 100190, China