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SPECTROSCOPY AND SPECTRAL ANALYSIS  2023, Vol. 43 Issue (02): 394-400    DOI: 10.3964/j.issn.1000-0593(2023)02-0394-07
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Emission Spectroscopy Study of Remote Ar Plasma
LI Ru, YANG Xin, XING Qian-yun, ZHANG Yu
School of Environmental and Chemical Engineering,Xi’an Polytechnic University,Xi’an 710048,China