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SPECTROSCOPY AND SPECTRAL ANALYSIS  2020, Vol. 40 Issue (06): 1973-1978    DOI: 10.3964/j.issn.1000-0593(2020)06-1973-06
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Error Analysis of the New Measurement Technique for Obtaining the Spectral Diffraction Efficiencies of a Grating
WANG Sheng-hao1, SHAO Jian-da1, 2, 3, LIU Shi-jie1*, LI Ling-qiao1*, WU Zhou-ling2, 3, CHEN Jian2, 3, HUANG Ming2, 3
1. Precision Optical Manufacturing and Testing Center, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
2. ZC Optoelectronic Technologies, Ltd., Hefei 230031, China
3. Anhui Province Key Laboratory of Non-Destructive Evaluation, Hefei 230031, China