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SPECTROSCOPY AND SPECTRAL ANALYSIS  2017, Vol. 37 Issue (10): 2995-2999    DOI: 10.3964/j.issn.1000-0593(2017)10-2995-05
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Spectroscopic Method for Diagnosing PS-PVD Jet of Different Gas Composition
WANG Kai1,LIU Min2,MAO Jie2,DENG Zi-qian2,WEN Kui1
1. School of Materials Science and Engineering, Central South University, Changsha 410000, China
2. Guangdong Institute of New Materials, National Engineering Laboratory for Modern Material Surface Engineering Technology, The Key Lab of Guangdong for Modern Surface Engineering Technology,Guangzhou 510651, China