光谱学与光谱分析 |
|
|
|
|
|
Characteristic Study of Plasma Plume Produced by Nanosecond Pulsed Laser Ablation of Silicon Using Optical Emission Spectroscopy |
GAO Xun1, 2, JIN Ming-xing1, DING Da-jun1*, LIN Jing-quan2 |
1. Institute of Atomic and Molecular Physics, Jilin University, Changchun 130012, China 2. School of Science, Changchun University of Science and Technology, Changchun, 130022, China |
|
|
Abstract The 355 nm laser pulse from THG (Third Harmonic Generation) of a Q-switched Nd3+∶YAG laser was used to ablate silicon mounted in air. The time-and space-resolved optical emission spectra were measured for different pulse energy in the wavelength range of 380-420 nm, the emission spectra of N+ was found for impact ionization of air near target surface on the early stage of plasma plume expansion. Under the model of local thermodynamic equilibrium, the electronic temperature of plasma was deduced to be in the range of 18 000-40 000 K using the Saha equation by the relative line intensities, and the electron density was deduced to be in the 1017 cm-3 scale by FWHM (the full width at half maximum) of Si spectral lines, the temporal and spatial evolution of the electronic temperature and electron density was given, showing that the electronic temperature and electron density exhibited second order exponential decreasing with laser delay time and a Lorentz distribution in space. The reason for the spatial position deviation of the maximum electron density from the maximum spectral intensity was analyzed. The relationship between the plasma plume parameters and laser pulse energy was discussed.
|
Received: 2009-08-16
Accepted: 2009-11-18
|
|
Corresponding Authors:
DING Da-jun
E-mail: dajund@jlu.edu.cn
|
|
[1] Tillack M S, Blair D W, Harilal S S. Nanotechnology, 2004, 15: 390. [2] Han Gyoowan, Murray P Terrence. J. Appl. Phys., 2000, 88(2): 1184. [3] Garrelie F, Champeaux C, Catherinot A. Applied Physics A: Materials Science & Processing, 1999, 69: S55. [4] Weck A, Crawford T H R, Borowiec A, et al. Applied Physics A: Materials Science & Processing, 2007, 86: 55. [5] Umezu Ikurou, Takata Masatoshi, et al. J. Appl. Phys., 2008, 103: 114309. [6] HAN Jing-hua, FENG Guo-ying, YANG Li-ming, et al(韩敬华, 冯国英, 杨李茗, 等). Spectroscopy and Spectral Analysis(光谱学与光谱分析), 2009, 29(4): 869. [7] Le Harzic R, Schuck H, Sauer D, et al. Optics Express, 2005, 13(17): 6651. [8] Seung H Ko, Yeonho Choi, Davad J. App. Phy. Lett., 2006, 89: 141126. [9] Hermann J, Bruneau S, Sentis M. Thin Solid Films, 2004, 453-454: 377. [10] Vivien C, Hermann J, Perrone A, et al. J. Phys. D: Appl. Phys., 1998,31: 1263. [11] Shen X K, Sun J, Xu N, et al. Diamond & Related Materials, 2006, 15: 1350. [12] MAN Bao-yuan, WANG Xiang-tai, HU Xie-rong, et al(满宝元, 王象泰, 胡燮荣, 等). Acta Optica Sinica(光学学报), 1997, 17(2): 161. [13] Park Hye Sun, Nam Sang Hwan, Park Seung Min. J. Appl. Phys., 2005, 97: 113103. [14] HUANG Qing-ju(黄庆举). Acta Physica Sinica(物理学报), 2008, 57(4): 2314. [15] WANG Gong-tang, WANG Xiang-tai, MAN Bao-yuan, et al(王公堂,王象泰,满宝元,等). Chinese J. Atomic and Molecular Physics(原子与分子物理学报), 1996,13(2):163. [16] Hafez M A, Khedr M A, Elaksher F F, et al. Plasma Sources Sci. Technol., 2003, 12: 185. [17] http://physics.nist.gov. [18] Man B Y, Dong Q L, Liu A H, et al. J. Opt. A: Pure and Applied Opt., 2004, 6(1): 17. [19] Wen Sy-Bor, Mao Xianglei, et al. J. Applied Physics, 2007, 101: 023114. [20] DENG Yun-pei, JIA Tian-qing, LENG Yu-xin, et al(邓蕴沛, 贾天卿, 冷雨欣, 等). Acta Physica Sinica(物理学报), 2004, 53(7): 2216.
|
[1] |
ZHANG Zhi-fen1, LIU Zi-min1, QIN Rui1, LI Geng1, WEN Guang-rui1, HE Wei-feng2. Real-Time Detection of Protective Coating Damage During Laser Shock Peening Based on ReliefF Feature Weight Fusion[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2023, 43(08): 2437-2445. |
[2] |
LI Chang-ming1, CHEN An-min2*, GAO Xun3*, JIN Ming-xing2. Spatially Resolved Laser-Induced Plasma Spectroscopy Under Different Sample Temperatures[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2023, 43(07): 2032-2036. |
[3] |
WANG Wei, WANG Yong-gang*, WU Zhong-hang, RAO Jun-feng, JIANG Song, LI Zi. Study on Spectral Characteristics of Pulsed Argon Vacuum Dielectric
Barrier Discharge[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2023, 43(02): 455-459. |
[4] |
LI Ru, YANG Xin, XING Qian-yun, ZHANG Yu. Emission Spectroscopy Study of Remote Ar Plasma[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2023, 43(02): 394-400. |
[5] |
YANG Kun, CHEN Lei*, CHENG Fan-chong, PEI Huan, LIU Gui-ming, WANG Bao-huai, ZENG Wen. Emission Spectroscopy Diagnosis of Air Gliding Arc Plasma Under
Atmospheric Pressure Condition[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2022, 42(10): 3006-3011. |
[6] |
LEI Bing-ying1, 2, XU Bo-ping1, 2, WANG Yi-shan1, 2, ZHU Xiang-ping1, 2, DUAN Yi-xiang3, ZHAO Wei1, 2, TANG Jie1*. Investigation of the Spectral Characteristics of Laser-Induced Plasma for Non-Flat Samples[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2022, 42(10): 3024-3030. |
[7] |
HU Xuan1, CHENG Zi-hui1*, ZHANG Shu-chao2, SHI Lei2. Matrix Separation-Determination of Rare Earth Oxides in Bauxite by
Inductively Coupled Plasma-Atomic Emission Spectrometry[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2022, 42(10): 3130-3134. |
[8] |
WANG Ling-ling1, 2, 3, WANG Bo1, 2, 3, XIONG Feng1, 2, 3, YANG Lu-cun1, 2, LI Jing-jing4, XIAO Yuan-ming1, 2, 3, ZHOU Guo-ying1, 2*. A Comparative Study of Inorganic Elements in Cultivativing Astragalus Membranaceus From Different Habitats[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2022, 42(05): 1407-1412. |
[9] |
LI Ai-yang1, FU Liang2*, CHEN Lin3. Determination of Trace Heavy Metal Elements in Plant Essential Oils by Inductively Coupled Plasma Optical Emission Spectrometry[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2022, 42(04): 1162-1167. |
[10] |
GONG Zheng1, LIN Jing-jun2*, LIN Xiao-mei3*, HUANG Yu-tao1. Effect of Heating and Cooling on the Characteristic Lines of Al During Melting[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2022, 42(02): 598-602. |
[11] |
ZHANG Bin-bin1, 2, LI Jing-bin1, 2, WANG Shi-ning1, 2, HE Peng-fei1, 2, ZHA Xiao-qin1, 2, 3. Determination of Lithium, Iron and Phosphorus in Carbon Composite Lithium Iron Phosphate by Perchloric Acid Digestion-Inductively Coupled Plasma Optical Emission Spectrometry[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2021, 41(09): 2703-2709. |
[12] |
SHAO Ming-jie1, 2, LIU Wen-ke1, 2*, ZHOU Cheng-bo1, 2, WANG Qi1, 2, LI Bao-shi1, 2. Effects of High Light Duration and Frequencies on Growth and Nutrient Element Contents of Hydroponic Lettuce Cultivated Under LED Red and Blue Light[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2021, 41(09): 2853-2858. |
[13] |
CHEN Chuan-jie1, 2, FAN Yong-sheng3, FANG Zhong-qing1, 2, WANG Yuan-yuan1, 2, KONG Wei-bin1, 2, ZHOU Feng1, 2*, WANG Ru-gang1, 2. Research on the Electron Temperature in Nanosecond Pulsed Argon Discharges Based on the Continuum Emission[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2021, 41(08): 2337-2342. |
[14] |
SONG Peng1,3, LI Zheng-kai2, CHEN Lei2*, WANG Xiao-fang1, LONG Wu-qiang1, ZENG Wen2. Diagnosis of Atmospheric Pressure Helium Cryogenic Plasma Jet[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2021, 41(06): 1874-1879. |
[15] |
ZHANG Peng-peng1, 2, HU Meng-ying1, 2, XU Jin-li1, 2*, CHEN Wei-ming1, 2, GU Xue1, 2, ZHANG Ling-huo1, 2, BAI Jin-feng1, 2, ZHANG Qin1, 2. Determination of Available Boron in Soil by ICP-OES With Boiling Water Extraction[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2021, 41(06): 1925-1929. |
|
|
|
|