光谱分析方法测试GMLM微间距的实验和方法推广

doi:10.3964/j.issn.1000-0593.2008.07.026

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Abstract Projection display devices are undergoing a period of multi-development, and with the maturation of MEMS technology, which leads to MEMS-based light modulators for display applications, have become one of the research focuses. The structure of MEMS-based grating moving light modulator (GMLM) is composed of the reflection plate, address electrode and four cantilevers, and movable grating plate, which is supported by four crab-cantilevers placed around, and is actuated like a piston by electrostatic force. The piston-type motion of grating can be used to modulate the phase of incident light. The micro-distance between the upper surface of movable grating and underlying reflector is a key parameter and is important to GMLM performance. Traditional measurement method such as step-machine would destroy the device; while a high accuracy and non-contact measurement machine called KYKO White Light Interferometer is expensive. In the present paper, the GMLM optical principle using scalar diffraction theory was in details analyzed. A novel non-contact wavelength scanning spectrum analysis method was put forward to measure the distance between the upper surface of movable grating and underlying reflector. The U-4100 spectrophotometer was adopted to gain spectrum information; while the spectrum analysis method using peak wavelength position was introduced to calculate the micro distance. The measurement result is consistent to theoretical result. The micro-distance is 1.131 3 μm using such non-contact wavelength scanning spectrum analysis method, while it is 1.240 0 μm with WYKO White Light Interferometer. The relative error was lower than 1%, compared with the results measured by WYKO White Light Interferometer, and the method has good repetition ability and is cheap with RMB50 Yuan each time. Furthermore, measuring pull-in voltage, resonance frequency and micro distance in MEMS-based diffraction and interference devices was proposed completely based on such non-contact wavelength scanning spectrum analysis method.

Key words：Spectrum;Light modulator;Micro distance;MEMS

Received: 2007-03-08 Accepted: 2007-03-08

ZTFLH:

TN761

Corresponding Authors: ZHANG Jie E-mail: zhangjie@cqu.edu.cn

Cite this article:

ZHANG Jie,HUANG Shang-lian,ZHANG Zhi-hai, et al. Experiments of Micro-Distance Measurement for GMLM with Spectrum Analysis Method[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2008, 28(07): 1684-1688.

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https://www.gpxygpfx.com/EN/10.3964/j.issn.1000-0593.2008.07.026 OR https://www.gpxygpfx.com/EN/Y2008/V28/I07/1684