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| Research on Chromatic Aberration Correction Method for
High-Resolution Roland Circle Optical System |
| CHEN Ji-wen, CHEN Zuo-er |
School of Electrical and Control Engineering, North China University of Technology, Beijing 100144, China
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Abstract The Roland circle optical system has many advantages. Still, due to using a planoconvex lens in the system, the imaging points that have undergone dispersion also generate a certain amount of offset distance near the Roland circle, resulting in the imaging points of each characteristic wavelength arranged sequentially on a curved surface. Due to the current use of new collection devices such as linear array CMOS or CCD, where the photosensitive area of these sensors is a flat surface, serious chromatic aberration is caused in the results. This article proposes a chromatic aberration correction method using the weighted least squares method to fit the image plane and calculate the two correction parameters of the center offset distance and offset tilt angle of the system image plane. Based on the original Roland circle optical system, these two correction parameters are introduced for chromatic aberration correction, thereby determining the optimal position of the linear array photoelectric sensor image plane and achieving high resolution. In addition, elements such as C, P, and S are very important in the VUV spectrum. The chromatic aberration correction method based on weighted least squares proposed in this article can achieve optimal resolution by increasing the weight proportion of characteristic wavelengths of such elements. Finally, optical simulation was conducted using Zemax software to complete the simulation and optimization of the Roland circle optical system. The imaging width simulation of spot diagrams in the 170~410 nm wavelength range and the spectral images of each element's characteristic wavelengths collected on CMOS sensors were provided. The resolution in practical applications was calculated, and the illuminance spectral images showed that their resolution could be maintained at 0.02 nm, close to the optimal theoretical resolution of the system. The research results of this article indicate that using the weighted least squares method to fit the image plane can achieve chromatic aberration correction for Roland circle optical systems and achieve high resolution.
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Received: 2023-07-05
Accepted: 2023-10-25
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