| 光谱学与光谱分析 |
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| Study on the Properties of the Pc-Si Films Prepared by Magnetron Co-Sputtering at Low Temperature |
| DUAN Liang-fei1,2, YANG Wen1,2, ZHANG Li-yuan1,2, LI Xue-ming1,2, CHEN Xiao-bo1,2, YANG Pei-zhi1,2* |
1. Key Laboratory of Renewable Energy Advanced Materials and Manufacturing Technology of Ministry of Education, Kunming 650092, China
2. Solar Energy Institute, Yunnan Normal University, Kunming 650092, China |
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Abstract The polycrystalline silicon thin films play an important role in the field of electronics. In the paper, α-SiAl composite membranes on glass substrates was prepared by magnetron co-sputtering. The contents of Al radicals encapsulated in the α-Si film can be adjusted by changing the Al to Si sputtering power ratios. The as-prepared α-Si films were converted into polycrystalline films by using a rapid thermal annealing (RTP) at low temperature of 350 ℃ for 10 minutes in N2 atmosphere. An X-ray diffractometer, and Raman scattering and UV-Visible-NIR Spectrometers were used to characterize the properties of the Pc-Si films. The influences of Al content on the properties of the Pc-Si films were studied. The results showed that the polycrystalline silicon films were obtained from α-SiAl composite films which were prepared by magnetron co-sputtering at a low temperature following by a rapid thermal annealing. The grain size and the degree of crystallization of the Pc-Si films increased with the increase of Al content, while the optical band gap was reduced. The nc-Si films were prepared when the Al to Si sputtering power ratio was 0.1. And a higher Crystallization rate (≥85%) of polycrystalline silicon films were obtained when the ratio was 0.3. The band gaps of the polycrystalline silicon films can be controlled by changing the aluminum content in the films.
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Received: 2014-10-11
Accepted: 2015-02-08
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Corresponding Authors:
YANG Pei-zhi
E-mail: pzhyang@hotmail.com
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