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SPECTROSCOPY AND SPECTRAL ANALYSIS  2016, Vol. 36 Issue (03): 635-639    DOI: 10.3964/j.issn.1000-0593(2016)03-0635-05
光谱学与光谱分析 |
Study on the Properties of the Pc-Si Films Prepared by Magnetron Co-Sputtering at Low Temperature
DUAN Liang-fei1,2, YANG Wen1,2, ZHANG Li-yuan1,2, LI Xue-ming1,2, CHEN Xiao-bo1,2, YANG Pei-zhi1,2*
1. Key Laboratory of Renewable Energy Advanced Materials and Manufacturing Technology of Ministry of Education, Kunming 650092, China2. Solar Energy Institute, Yunnan Normal University, Kunming 650092, China