| 光谱学与光谱分析 |
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| Study of Spectrum Characteristic of Humidity Sensor Based on Series Coupled Two Micro-Ring Resonators |
| GUO Shi-liang1, HU Chun-hai1, LI Xin2, WANG Wen-juan1 |
1. Institute of Electrical Engineering, Yanshan University, Qinhuangdao 066004, China
2. Control and Simulation Center, Harbin Institute of Technology, Harbin 150080, China |
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Abstract A novel humidity sensor of polyimide(PI) based on the series coupled two-micro-ring resonators is proposed in the present paper. The transfer function of the micro ring resonator was calculated by using the transfer matrix method and the coupled mode theory. The authors compared the output spectrum characteristics of the traditional single micro-ring and series coupled two-micro-ring with different radii. The refractive index of the PI waveguide changes with different environmental humidity and this will lead to the drift of the output spectrum of the micro-ring resonator. By detecting the drift of the output spectrum we can measure the humidity, and the sensitivity and the sensing-range of the sensor are acquired accordingly. We also analyzed the output spectrum characteristics of resonators at different humidity sensing part. The theoretical results show the good performance of humidity sensor which could be used as the optimum sensing unit when the whole structure of the series coupled two-micro-ring resonators serves as the sensing part. The sensing-range and sensitivity of the system are improved by series micro-ring resonators of different radii compared to the conventional sensor with single micro-ring resonator. The free spectral range (FSR) of resonator reaches to 0.15 μm, the sensing-range is 10%RH～80%RH, and the sensitivity is 0.001 7 μm·(%RH)-1. Series coupled two-micro-ring with different radii gives theoretical instruction for producing integrated humidity sensor with low-cost, simple structure and high sensitivity.
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Received: 2014-03-22
Accepted: 2014-06-25
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Corresponding Authors:
GUO Shi-liang
E-mail: guosl0112@163.com
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[1] Kim J H, Moon B M, Hong S M. Microsystem Technologies, 2012, 18(1): 31.
[2] Kim E, Kim S Y, Jo G, et al. ACS Applied Materials & Interfaces, 2012, 4(10): 5179.
[3] Bhola B, Nosovitskiy P, Mahalingam H, et al. Sensors Journal, IEEE, 2009, 9(7): 740.
[4] Wu Y, Zhang T H, Rao Y J, et al. Sensors and Actuators B: Chemical, 2011, 155(1): 258.
[5] Gu B, Yin M, Zhang A P, et al. Optics Express, 2011, 19(5): 4140.
[6] Huang X F, Sheng D R, Cen K F, et al. Sensors and Actuators B: Chemical, 2007, 127(2): 518.
[7] Tang Q Y, Chan Y C, Zhang K. Sensors and Actuators B: Chemical, 2011, 152(1): 99.
[8] Niimi N, Yoshida T, Isogai T. SAE International Journal of Passenger Cars-Electronic and Electrical Systems, 2013, 6(1): 328.
[9] Lourdes Alwis, Tong Sun, Kenneth V. Grattan. IEEE Sensors Journal, 2013, 13(2): 767.
[10] LI Zhi-quan, ZHANG Xin, SUN Yu-chao, et al(李志全，张 鑫，孙宇超，等). Spectroscopy and Spectral Analysis(光谱学与光谱分析), 2013，33(5): 1309.
[11] Hsu H W, Lai C H, Ma T G. IEEE Microwave and Wireless Components Lett., 2010, 20(10): 542.
[12] Sun S. IEEE Microwave and Wireless Components Lett., 2011, 21(6): 298.
[13] LIU Xin, KONG Mei, WEN Quan（刘 鑫, 孔 梅, 文 权）. Chinese Journal of Lasers（中国激光）, 2010, 37(11) : 2885.
[14] YANG Jian-yi, JIANG Xiao-qing, WANG Ming-hua(杨建义, 江晓清, 王明华). Acta Optica Sinica(光学学报), 2003, 23(10): 31.
[15] Zamora V, Lützow P, Weiland M, et al. Optics Express, 2013, 21(23): 27550.
[16] Shibata H, Ito M, Asakursa M, et al. Instrumentation and Measurement, IEEE Transactions on, 1996, 45(2): 564. |
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