| 光谱学与光谱分析 |
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| The Experiment Study on the Resolution of Electro-Optical Imaging System at EUV Wave Band |
| XUE Ling-ling, CHEN Bo, LI Yu-min |
| State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Science, Changchun 130022, China |
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Abstract An imaging system based on a Microchannel Plate(MCP) detector was designed to image the Eｘtreme Ultraviolet(EUV) light. The images of a 3 mm-width-slit were presented by this imaging system at the wavelengths of 13，17.1，19.5 and 30.4 nm respectively． Their corresponding spatial resolutions are 85，120，182 and 495 μm respectively． The best is 85 μm，corresponding to 13 nm． Moreover，the shorter the wavelength，the better the spatial resolution． So is the brightness of the image.
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Received: 2002-09-29
Accepted: 2003-04-29
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Corresponding Authors:
XUE Ling-ling
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| Cite this article: |
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XUE Ling-ling,CHEN Bo,LI Yu-min. The Experiment Study on the Resolution of Electro-Optical Imaging System at EUV Wave Band [J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2004, 24(05): 529-531.
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| URL: |
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http://www.gpxygpfx.com/EN/Y2004/V24/I05/529 |
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