加入收藏  设为首页
 
Home | 中文  
   Home   |   About Journal   |   Editorial Board   |   Instruction   |   Rewarded   |   Indexed-in   |   Impect Factor   |   Subscriptions   |   Contacts Us
SPECTROSCOPY AND SPECTRAL ANALYSIS  2022, Vol. 42 Issue (06): 1666-1673    DOI: 10.3964/j.issn.1000-0593(2022)06-1666-08
|
Fourier Transform Near-Infrared Spectral System Based on Laser-Driven Plasma Light Source
WANG Yue1, 3, 4, CHEN Nan1, 2, 3, 4, WANG Bo-yu1, 5, LIU Tao1, 3, 4*, XIA Yang1, 2, 3, 4*
1. Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100190, China
2. University of Chinese Academy of Sciences, Beijing 100049, China
3. Beijing Research Center of Engineering and Technology of Instrument and Equipment for Microelectronics Fabrication, Beijing
100029, China
4. Beijing Key Laboratory of IC Test Technology, Beijing 100089, China
5. School of Graduate, Beijing Jiaotong University, Beijing 100044, China