| 光谱学与光谱分析 |
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| Effect of Substrate Temperature on Optical Emission Spectra in Electron-Assisted Chemical Vapor Deposition of Diamond |
| WANG Zhi-jun,LI Pan-lai,SHANG Yong,HE Ya-feng,RAN Jun-xia |
| College of Physics Science and Technology,Hebei University,Baoding 071002,China |
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Abstract The optical emission spectra of atomic hydrogen (Hα,Hβ and Hγ),atomic carbon C(2p3s→2p2: λ=165.7 nm) and radical CH(A2Δ→X2Π: λ=420-440 nm) in the gas phase process of the diamond film growth with electron-assisted chemical vapor deposition (EACVD) from a gas mixture of CH4 and H2 were studied by using Monte-Carlo simulation. The effects of substrate temperature on the optical emission spectral and diamond synthesis were investigated. The results showed that the range of variation of intensities of optical emission spectra near the substrate with the substrate temperature is wider than that far from the substrate,suggesting that the substrate temperature just affects the gas phase reaction process near the substrate,and the strong dependence of the quality of diamond film on the substrate temperature is due to the change in phase process near the substrate brought by the substrate temperature.
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Received: 2006-04-16
Accepted: 2006-07-28
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Corresponding Authors:
WANG Zhi-jun
E-mail: wangzhijunmail@yahoo.com.cn
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| Cite this article: |
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WANG Zhi-jun,LI Pan-lai,SHANG Yong, et al. Effect of Substrate Temperature on Optical Emission Spectra in Electron-Assisted Chemical Vapor Deposition of Diamond[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2007, 27(08): 1473-1475.
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| URL: |
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https://www.gpxygpfx.com/EN/Y2007/V27/I08/1473 |
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