Abstract:Chromium doped amorphous hydrogenated carbon a-C∶H(Cr) films (2.23 μm in thickness)have been successfully prepared with unbalanced magnetron sputtering technology(UBMS) in this paper. Raman spectrum and X-ray photoelectron spectroscopy (XPS) have been used to study the structure and thermal stability of the Chromium doped diamond-like carbon films (Cr-DLC). The results indicate that, at the room temperature, the Raman absorption peak “G” near 1 580 cm-1was assigned to C—C stretching vibration mode (E2g) in the Cr-DLC films, while the peak “D” near 1 350 cm-1was assigned to sp2 breathing vibration mode (A1g). The relative concentration of sp3 bond in the film is at 48%. When heated till 300 ℃, the Raman pattern of sample is similar to that of the sample at room temperature, indicating the structure of Cr-DLC film is stable. At 400 ℃, the ratio of ID/IG and the concentration of sp2 bond clearly increase, indicating the change of the structure in the Cr-DLC and the appearance of graphitization. With temperature going up, the rise of ID/IG ratio and the shift of the peak “G” to high wavenumber show that the rise of sp2/sp3 ratio, the intensity of graphitization, and the decline of the disorder of sp2 in the Cr-DLC films lead to the increase of the friction coefficient and wearing rate and the decline of the Cr-DLC thermal stability. When the it is up to 600 ℃, the ratio of ID/IG and the concentration of sp2 bond reach the max value while the Cr-DLC film loses its efficacy.
卢保奇,许耀先,申广耀,季江华,王林军. 非平衡磁控溅射法制备的Cr-DLC薄膜真空退火的Raman光谱研究[J]. 光谱学与光谱分析, 2016, 36(11): 3568-3571.
LU Bao-qi, XU Yao-xian, SHEN Guang-yao, JI Jiang-hua, WANG Lin-jun. Raman Spectra Study on the Structure and Thermal Stability of Vacuum Annealed Cr-DLC Films Prepared with UBMS. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2016, 36(11): 3568-3571.
[1] Chowdhury S, Laugier M T, Rahman I Z. Thin Solid Films, 2004, 447-448: 174. [2] Dillon R O, Woollam J A. Physical Review, 1984, B29: 3482. [3] JU Jian-hua, XIA Yi-ben, ZHANG Wei-li(居建华,夏义本,张伟丽). Journal of Functional Materials(功能材料), 2001, 32(5): 473. [4] Mariotto G, Freire JrF L, Achete C A. Thin Solid Films, 1994, 241: 255. [5] Farrow L A, Willkens B J, Gozdz A S, et al. Physical Review, 1990, B41: 10132. [6] Gonzalez-Hernandez J, Gozdz B S, Pawlik D A. Material Science Forum., 1989, 52-53: 543. [7] Bharathy P V, Nataraj D, Chu P K, et al. Applied Surface Science, 2010, 257: 143. [8] Dai W, Wang A Y. J. Journal of Alloys and Compounds, 2011, 509: 4626. [9] Ferrari A C, J. Robertson J I. Physieal Review. B. Condensed Matter, 2000, 61(20): 14095. [10] Baptista D L,Zawislak F C. Diamond and Related Materials,2004, 13(10); 1791.