Comparative Study on Thin Films of Cadmium Sulfide Prepared by Chemical Bath Deposition and Radio Frequency Magnetron Sputtering
WANG Sheng-li1, WANG Xue-jin1*, WANG Wen-zhong2, LIANG Chun-jun3, WANG Zhi2，QI Zheng1
1. College of Science, China Agricultural University, Beijing 100083, China 2. Institute of Process Engineering, Chinese Academy of Sciences 100190, China 3. School of Science, Beijing Jiaotong University, Beijing 100044, China
Abstract：Thin films of cadmium sulfide (CdS) were prepared with ammonium chloride, cadmium chloride, potassium hydroxide and thiourea by chemical bath deposition (CBD). For comparison, CdS films were also deposited by radio frequency (RF) magnetron sputtering, using CdS and argon as a target and reactive gas, respectively. The films were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM) and ultraviolet-visible spectroscopy. The results show that the CdS films prepared by the above two methods have (002) orientation, the CdS films deposited by RF magnetron sputtering are more compact and much smoother than those prepared by CBD, and have lager crystalline size of about 20~30 nm. The CdS films prepared by CBD have smaller crystalline size and more defects. The properties of CdS thin films prepared by RF magnetron sputtering are totally superior to those of CdS films by CBD, but the optical transmittance of CdS thin films at short wavelength is an exception. The energy gap of CdS films prepared by the two methods are all in the range of 2.3~2.5 eV.
王胜利1，王学进1*，王文忠2，梁春军3，王 志2，祁 铮1 . 化学水浴法和磁控溅射法制备硫化镉薄膜的性能研究[J]. 光谱学与光谱分析, 2012, 32(04): 1094-1097.
WANG Sheng-li1, WANG Xue-jin1*, WANG Wen-zhong2, LIANG Chun-jun3, WANG Zhi2，QI Zheng1 . Comparative Study on Thin Films of Cadmium Sulfide Prepared by Chemical Bath Deposition and Radio Frequency Magnetron Sputtering. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2012, 32(04): 1094-1097.
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