Abstract：The laser-induced breakdown spectroscopy (LIBS) technique, due to its lack of pretreatment of the material and the speed of analysis, has shown a great potential for a wide range of industrial applications. The current situation of application and study of LIBS are reviewed. Meanwhile, the laser used to explode the Cr and Co film had a pulse duration of 10 ns, the highest single pulse energy was 50 mJ at a repetition rate of 20 Hz, and a wavelength of 1 064 nm. When the excitation energy was less than 10 mJ, there was little difference in spectral signal excited by different energy for Cr film. Otherwise, the signal showed obvious change when excitation energy was higher than 10 mJ. The principle, characters, history and recent trend of LIBS were introduced systematically. The factors influencing LIBS performances, including the characteristic of laser, delay time, experiment setting, the kind and the pressure of surrounding. Gas, single or dual pulse, and the analysis method were analyzed.
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