光谱学与光谱分析 |
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Determination of Mean Electron Energy in O2 Non-Equilibrium Plasma by Relative Spectrum Line Intensity |
DONG Li-fang,YIN Yan |
College of Physics Science and Technology, Hebei University, Baoding 071002, China |
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Abstract The process of O2 non-equilibrium plasma is simulated by Monte Carlo method. The electron drift velocity as a function of E/N is given, which is in good agreement with experimental result. The variations of mean electron energy and the number density of electronic excitation states of O2 with the reduced field E/N are simulated. A method to determine the mean electron energy by relative spectrum line intensity is proposed, which is of great importance to the applications of non-equilibrium plasma in many fields such as material preparation, laser application, micro-electronics technology and so on.
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Received: 2004-03-22
Accepted: 2004-06-26
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Corresponding Authors:
DONG Li-fang
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Cite this article: |
DONG Li-fang,YIN Yan. Determination of Mean Electron Energy in O2 Non-Equilibrium Plasma by Relative Spectrum Line Intensity [J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2005, 25(09): 1534-1535.
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URL: |
https://www.gpxygpfx.com/EN/Y2005/V25/I09/1534 |
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