Determination of Electron Density in Atmospheric Pressure Radio Frequency Dielectric Barrier Discharges by Stark Broadening
LI Sen, LIU Zhong-wei*, CHEN Qiang, LIU Fu-ping, WANG Zheng-duo, YANG Li-zhen
Plasma Physics and Materials Laboratory, Beijing Key Laboratory of Printing and Packaging Materials and Technology, Beijing Institute of Graphic Communication, Beijing 102600, China
Abstract：The use of high frequency power to generate plasma at atmospheric pressure is a relatively new development. An apparatus of atmospheric pressure radio frequency dielectric barrier discharge was constructed. Plasma emission based measurement of electron density in discharge columns from Stark broadening Ar is discribed. The spacial profile of electron density was studied. In the middle of the discharge column, as the input power increases from 138 to 248 W, the electron density rises from 4.038×1021 m-3 to 4.75×1021 m-3.
Key words：Electron density;Stark broadening;Atmospheric pressure;Radio frequency discharge
李 森, 刘忠伟*, 陈 强, 刘福平, 王正铎, 杨丽珍 . 使用斯塔克展宽计算大气压射频介质阻挡放电氮气等离子体的电子密度[J]. 光谱学与光谱分析, 2012, 32(01): 33-36.
LI Sen, LIU Zhong-wei*, CHEN Qiang, LIU Fu-ping, WANG Zheng-duo, YANG Li-zhen . Determination of Electron Density in Atmospheric Pressure Radio Frequency Dielectric Barrier Discharges by Stark Broadening. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2012, 32(01): 33-36.
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