1. The Key Laboratory of Silicate Materials Science and Engineering, Ministry of Education, Wuhan University of Technology,Wuhan 430070，China 2. Center for Materials Research and Analysis, Wuhan University of Technology，Wuhan 430070，China
Abstract：TiO2 films have been deposited on glass substrates using DC reactive magnetron sputtering at different oxygen partial pressures from 0.10 to 0.65 Pa. The photoluminescence (PL) spectra of the films were recorded. The results of the PL spectra showed that there were three emission peaks at 370，472 and 514 nm for the films sputtered at 0.35 and 0.65 Pa, and there were two peaks at 370 and 490 nm for the films sputtered at 0.10 and 0.15 Pa. The band-gap for the films was 3.35 eV. For the films sputtered at 0.35 and 0.65 Pa there were two defect energy levels at 2.63 and 2.41 eV, corresponding to 0.72 and 0.94 eV below conduction band for the band-gap, respectively. For the films sputtered at 0.10 and 0.15 Pa, there was an energy band formed between 3.12 and 2.06 eV, corresponding to 0.23 and 1.29 eV below the conduction band. With increasing the oxygen partial pressure, the defect energy band changed to two energy levels, and the energy levels nearly disappeared for the film sputtered at 0.65 Pa of oxygen partial pressure.
赵青南1, 2，李春领1, 2，刘保顺1，赵修建1 . 氧气分压对反应溅射制备TiO2薄膜带隙的影响 [J]. 光谱学与光谱分析, 2004, 24(05): 603-605.
ZHAO Qing-nan1, 2，LI Chun-ling1, 2，LIU Bao-shun1，ZHAO Xiu-jian1 . Effect of Oxygen Partial Pressure on the Band-Gap of the TiO2 Films Prepared by DC Reactive Sputtering . SPECTROSCOPY AND SPECTRAL ANALYSIS, 2004, 24(05): 603-605.
