Abstract:An imaging system based on a Microchannel Plate(MCP) detector was designed to image the Extreme Ultraviolet(EUV) light. The images of a 3 mm-width-slit were presented by this imaging system at the wavelengths of 13,17.1,19.5 and 30.4 nm respectively. Their corresponding spatial resolutions are 85,120,182 and 495 μm respectively. The best is 85 μm,corresponding to 13 nm. Moreover,the shorter the wavelength,the better the spatial resolution. So is the brightness of the image.
薛玲玲,陈 波,李玉民 . EUV波段电光成像系统分辨率的实验研究 [J]. 光谱学与光谱分析, 2004, 24(05): 529-531.
XUE Ling-ling, CHEN Bo, LI Yu-min . The Experiment Study on the Resolution of Electro-Optical Imaging System at EUV Wave Band . SPECTROSCOPY AND SPECTRAL ANALYSIS, 2004, 24(05): 529-531.
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