The Optimizing Design and Experiment for a MOEMS Micro-Mirror Spectrometer
MO Xiang-xia, WEN Zhi-yu, ZHANG Zhi-hai, GUO Yuan-jun
National Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology, The Key Laboratory for Opto-Eletronic Technology and System under Ministry of Education, Chongqing University, Chongqing 400044
Abstract：A MOEMS micro-mirror spectrometer, which uses micro-mirror as a light switch so that spectrum can be detected by a single detector, has the advantages of transforming DC into AC, applying Hadamard transform optics without additional template, high pixel resolution and low cost. In this spectrometer, the vital problem is the conflict between the scales of slit and the light intensity. Hence, in order to improve the resolution of this spectrometer, the present paper gives the analysis of the new effects caused by micro structure, and optimal values of the key factors. Firstly, the effects of diffraction limitation, spatial sample rate and curved slit image on the resolution of the spectrum were proposed. Then, the results were simulated; the key values were tested on the micro mirror spectrometer. Finally, taking all these three effects into account, this micro system was optimized. With a scale of 70 mm×130 mm, decreasing the height of the image at the plane of micro mirror can not diminish the influence of curved slit image in the spectrum; under the demand of spatial sample rate, the resolution must be twice over the pixel resolution; only if the width of the slit is 1.818 μm and the pixel resolution is 2.278 6 μm can the spectrometer have the best performance.
