Abstract：The soft X-ray and vacuum ultraviolet sources developed in CIOMP are presented. The wall-stabilized argon arc source with spectrum stability and repeatability of ±0.3% is applied to the calibration of spectrum intensity distribution of the vacuum ultraviolet instruments as an absolute standard source. The Penning source, duobplasma source and hollow cathode source are able to produce atomic and ionic line spectra as a wavelength standard source, which covers a few nanometers to several tens nanometers with spectrum radiation stability and repeatability of ±1.0%. In particular, the low debris laser produced plasma source with liquid aerosol spray target recently developed can emit stronger soft X-ray for soft X-ray lithography and metrology, which has a transfer efficiency as high as 0.75%/2π·sr/2% bandwidth.
陈 波，尼启良，曹健林，李福田，陈星旦 . 软X射线-真空紫外波段光谱光源研究[J]. 光谱学与光谱分析, 2005, 25(03): 360-364.
CHEN Bo, NI Qi-liang, CAO Jian-lin, LI Fu-tian，CHEN Xing-dan . Development of Soft X-Ray and Vacuum Ultraviolet Spectrum Sources . SPECTROSCOPY AND SPECTRAL ANALYSIS, 2005, 25(03): 360-364.
[1] LI Fu-tian, SUN Guo-hua, QIAN Li-min(李福田，孙国华，钱利民). Acta Optica Sinica(光学学报)，1984, 4(11)：1013. [2] LＩ Fu-tian, CAO Jian-lin, CHEN Bo et al. Proceedings SPIE, 1990, 1345: 78. [3] Cao, Jianlin, Li Futian, Qian Limin et al. Proceedings SPIE, 1990, 1345: 71. [4] LI Fu-tian, SUN Guo-hua, WANG Qiu-zhen(李福田，孙国华，王秋珍). Optics and Fine Mechanics(光学机械), 1989, (6)：20. [5] CHEN Bo(陈 波). Optics and Fine Mechanics(光学机械), 1989, (6): 10. [6] LIN Jing-quan, CHEN Bo, CAO Jian-lin et el(林景全，陈 波，曹健林等). Chinese Journal of Lasers(中国激光)，1999，26(8)：687. [7] Ni Qiliang，Chen Bo et al. SPIE，2001，4502. [8] NI Qi-liang, GONG Yan，LIN Jing-quan, CHEN Bo, CAO Jian-lin(尼启良，巩 岩, 林景全，陈 波，曹健林). Spectroscopy and Spectral Analysis(光谱学与光谱分析)，2003，23(1)：101.
