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SPECTROSCOPY AND SPECTRAL ANALYSIS  2016, Vol. 36 Issue (11): 3461-3469    DOI: 10.3964/j.issn.1000-0593(2016)11-3461-09
光谱学与光谱分析 |
Application Progress of Holographic Lithgraphy in Fabrication of Micro-Nano Photonic Structures
WANG Xia1,2, Lü Hao1,2, ZHAO Qiu-ling1,2, ZHANG Shuai-yi1,2, TAM Wing-yim3
1. College of of Mathematics and Physics, Qingdao University of Science and Technology, Qingdao 266061, China 2. Advanced Optoelectronic Materials and Technologies Engineering Laboratory of Shandong, Qingdao 266061, China 3. Physics Department, Hong Kong University of Science and Technology, Hong Kong, China