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SPECTROSCOPY AND SPECTRAL ANALYSIS  2015, Vol. 35 Issue (05): 1376-1382    DOI: 10.3964/j.issn.1000-0593(2015)05-1376-07
光谱学与光谱分析 |
Application of LIBS in Element Analysis of Nanometer Thin Film Prepared on Silicon Basement
SUN Yu-xiang1,3, ZHONG Shi-lei1,3*, LU Yuan2, SUN Xin1,3, MA Jun-yan1,3, LIU Zhe1,3
1. College of Physics Science, Qingdao University, Qingdao 266071, China2. Optics and Optoelectronics Laboratory, Ocean University of China, Qingdao 266100, China3. Key Laboratory of Photonics Materials and Technology in Universities of Shandong (Qingdao University), Qingdao 266071, China