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SPECTROSCOPY AND SPECTRAL ANALYSIS  2015, Vol. 35 Issue (02): 474-478    DOI: 10.3964/j.issn.1000-0593(2015)02-0474-05
光谱学与光谱分析 |
Piezoresistivity of Ultra-Thin Poly-Silicon Layer by Aluminum-Induced Layer Exchange
WANG Cheng-long1, MA Jun1, FAN Duo-wang1, 2, XING Da3, LIU Song-hao3
1. National Engineering Research Center for Technology and Equipment of Environmental Deposition, Lanzhou Jiaotong University, Lanzhou 730070, China2. Key Laboratory of Opto-Technology and Intelligent Control Ministry of Education, Lanzhou Jiaotong University, Lanzhou 730070, China3. School for Information and Optoelectronic Science and Engineering, South China Normal University, Guangzhou 510631, China