光谱学与光谱分析 |
|
|
|
|
|
Application of Confocal Technology Based on Polycapillary X-Ray Lens in Measuring Thickness |
PENG Song1, 2, 3, LIU Zhi-guo1, 2, 3, SUN Tian-xi1, 2, 3*, LI Yu-de1, 2, 3, LIU He-he1, 2, 3, ZHAO Wei-gang1, 2, 3, ZHAO Guang-cui1, 2, 3, LIN Xiao-yan1, 2, 3, LUO Ping1, 2, 3, PAN Qiu-li1, 2, 3, DING Xun-liang1, 2, 3 |
1. The Key Laboratory of Beam Technology and Material Modification of Ministry of Education, Beijing Normal University, Beijing 100875, China 2. College of Nuclear Science and Technology, Beijing Normal University, Beijing 100875, China 3. Beijing Radiation Center, Beijing 100875, China |
|
|
Abstract A confocal micro X-ray fluorescence thickness gauge based on a polycapillary focusing X-ray lens, a polycapillary parallel X-ray lens and a laboratory X-ray source was designed in order to analyze nondestructively the thickness of thin film and cladding material. The performances of this confocal thickness gauge were studied. Two Ni films with a thickness of about 25 and 15 μm respectively were measured. The relative errors corresponding to them were 3.5% and 7.1%, respectively. The thickness uniformity of a Ni films with a thickness of about 10 μm was analyzed. This confocal technology for measuring the thickness was both spatially resolved and elemental sensitive, and therefore, it could be used to measure the thickness of the multilayer sample and analyze the thickness uniformity of the sample. This confocal thickness gauge had potential applications in analyzing the thickness of sample.
|
Received: 2012-11-01
Accepted: 2013-02-18
|
|
Corresponding Authors:
SUN Tian-xi
E-mail: stx@bnu.edu.cn
|
|
[1] Joshua R Ehrlich, Jeffrey Peterson, George Parlitsis,et al. Experimental Eye Research, 2011, 92(3): 189. [2] Hua Dai, Yao Shen, Hong Zhou,et al. Thin Solid Films, 2008, 516(8): 1796. [3] Janine Wagner, Thomas Moschakis, Phillip V Nelson,et al. Journal of Food Engineering, 2011, 105(3): 530. [4] Sim L M, Tan T C, Mon A A,et al. NDT&E International, 2009, 42: 291. [5] Kim Jong-Yun, Choi Yong Suk, Park Yong Joon,et al. Applied Radiation and Isotopes, 2011, 69: 1241. [6] Liu Xuechao, Myronov M, Dobbie A, et al. Solid-State Electronics, 2011, 60(1): 42. [7] Vrielink J A M, Tiggelaar R M, Gardeniers J G E,et al. Thin Solid Films, 2012, 520: 1740. [8] Yang Jun, Tsuji Kouichi, Lin Xiaoyan,et al. Thin Solid Films, 2009, 517: 3357. [9] Sun Tianxi, Liu Zhiguo, Li Yude,et al. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometer, Detector and Associated Equipment, 2009, 3(606): 829. [10] Janssens K, Proost K, Falkenberg G. Spectrochimica Acta Part B, 2004, 59: 1637. [11] Sun Tianxi, Liu Zhiguo, Li Yude,et al. Applied Spectroscopy, 2011, 65(12): 1398. |
[1] |
WANG Yi-ya1, WANG Yi-min1*, GAO Xin-hua2. The Evaluation of Literature and Its Metrological Statistics of X-Ray Fluorescence Spectrometry Analysis in China[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2022, 42(05): 1329-1338. |
[2] |
HAN Bing1, SUN Dan-dan2*, WAN Wei-hao1, WANG Hui3, DONG Cai-chang2, ZHAO Lei3, WANG Hai-zhou3*. Element Segregation of Cast-Rolled 7B05 Aluminum Alloy Based on
Microbeam X-Ray Fluorescence[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2022, 42(05): 1413-1419. |
[3] |
JIANG Xiao-yu1, 2, LI Fu-sheng2*, WANG Qing-ya1, 2, LUO Jie3, HAO Jun1, 2, XU Mu-qiang1, 2. Determination of Lead and Arsenic in Soil Samples by X Fluorescence Spectrum Combined With CARS Variables Screening Method[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2022, 42(05): 1535-1540. |
[4] |
LI Xiao-li1, GAO Xin-hua2, WANG Yi-min3*, DENG Sai-wen3, WANG Yi-ya3, LI Song3. Review on the Application of X-Ray Fluorescence Spectrometry in Halogen Elements Analysis in Geological Materials[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2022, 42(04): 997-1009. |
[5] |
NI Zi-yue1, CHENG Da-wei2, LIU Ming-bo2, YUE Yuan-bo2, HU Xue-qiang2, CHEN Yu2, LI Xiao-jia1, 2*. The Detection of Mercury in Solutions After Thermal Desorption-
Enrichment by Energy Dispersive X-Ray Fluorescence[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2022, 42(04): 1117-1121. |
[6] |
PAN Qiu-li1, SHAO Jin-fa1, LI Rong-wu2, CHENG Lin1*, WANG Rong1. Non-Destructive Analysis of Red and Green Porcelain in Qing Dynasty[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2022, 42(03): 732-736. |
[7] |
CUI Ming-fang1, ZHU Jian-hua2*, HU Rui1, CHEN Shang-qian3. Research on the Chemical Composition and Process Feature of Ancient Porcelain Produced in Dongmendu Kiln[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2022, 42(03): 726-731. |
[8] |
HUANG Yu-ying1, 2, 3, ZHONG Xin-yu2, 3. Progress of Synchrotron Radiation X-Ray Fluorescence Spectrometry in China and Overseas[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2022, 42(02): 333-340. |
[9] |
YANG Jiong1, 2, QIU Zhi-li1, 4*, SUN Bo3, GU Xian-zi5, ZHANG Yue-feng1, GAO Ming-kui3, BAI Dong-zhou1, CHEN Ming-jia1. Nondestructive Testing and Origin Traceability of Serpentine Jade From Dawenkou Culture Based on p-FTIR and p-XRF[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2022, 42(02): 446-453. |
[10] |
JIANG Yan1, MAO Ling-lin3, WU Jun3, YANG Xi4, DAI Lu-lu1, YANG Ming-xing1, 2*. Scientific Analysis of Five Turquoise Beads Unearthed From Haochuan Cemetery in Suichang, Zhejiang[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2022, 42(02): 568-574. |
[11] |
WAN Xiao-ming1, 2, ZENG Wei-bin1, 2, LEI Mei1, 2, CHEN Tong-bin1, 2. Micro-Distribution of Elements and Speciation of Arsenic in the Sporangium of Pteris Vittata[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2022, 42(02): 478-482. |
[12] |
WANG Xue-yuan1, 2, 3, HE Jian-feng1, 2, 3*, NIE Feng-jun2, YUAN Zhao-lin1, 2, 3, LIU Lin1, 2, 3. Decomposition of X-Ray Fluorescence Overlapping Peaks Based on Quantum Genetic Algorithm With Multi-Fitness Function[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2022, 42(01): 152-157. |
[13] |
LIU Ji-fu1, YANG Ming-xing1*, SU Yue1, LIU Yue2. Analysis of Material and Source of Archaic Jade From the Tomb of Marquis Yi of Zeng in Suizhou, Hubei Province[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2022, 42(01): 215-221. |
[14] |
SHI Ruo-yu1, WEN Rui1*, GAO Xiang2, WANG Wen-xuan1, BAO Li-ge3, ZHAO Xue-feng4, LI Zi-xuan1, CAO Kun1, XIAO Wei1, LI Yu-long1. X-Ray Fluorescence Spectroscopy Combined With SEM-EDS Analysis to Glaze Composition of Glazed Tiles in Yuan Dynasty[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2021, 41(12): 3808-3814. |
[15] |
JIA Wen-bao1, TANG Xin-ru1, ZHANG Xin-lei1, SHAO Jin-fa2, XIONG Gen-chao1, LING Yong-sheng1, HEI Dai-qian3, SHAN Qing1*. Study on Sample Preparation Method of Plant Powder Samples for Total Reflection X-Ray Fluorescence Analysis[J]. SPECTROSCOPY AND SPECTRAL ANALYSIS, 2021, 41(12): 3815-3821. |
|
|
|
|