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SPECTROSCOPY AND SPECTRAL ANALYSIS  2017, Vol. 37 Issue (11): 3332-3337    DOI: 10.3964/j.issn.1000-0593(2017)11-3332-06
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Study on Terahertz Pulse Spectra Technology to Measure the Thickness of Micro-Scale Multilayer Coatings
LIN Yu-hua1,2, HE Ming-xia1,2*, LAI Hui-bin1,2, LI Peng-fei1,2, MA Wen-he1,2
1. State Key Laboratory of Precision Measuring Technology and Instmment, Tianjin University, Tianjin 300072, China
2. The Centre of Terahertz, Tianjin University, Tianjin 300072, China