Design of Concave Grating for Ultraviolet-Spectrum
LUO Biao1，2, WEN Zhi-yu1，2*, WEN Zhong-quan1，2, ZENG Tian-ling1,2
1. Key Laboratory of Optoelectronic Technology and System of Ministry of Education, Chongqing University, Chongqing 400044, China 2. Micro-System Research Center of Chongqing University, Chongqing 400044, China
Abstract：Ultraviolet-spectrum technology is a kind of low signal and multianalysis technology. For taking full advantage of spectral information and reducing the volume of spectrometer, we used high efficiency spectroscopy structure based on concave grating. Based on concave grating theory and optic design software ZEMAX, a flat field concave grating for ultraviolet spectrophotometer was designed from primary structure, which relied on global optimization of the software. The contradiction between wide spectrum bound and limited spectrum extension was resolved, aberrations were reduced successfully, spectrum information was utilized fully, and the optic structure of spectrometer was highly efficient. For better preference of this spectrophotometer, after get the structure parameter, combine grating fabrication condition with practice working condition, grating diffractive theory, holographic optics theory and software PCGrate was used for diffraction efficiency design and improve. A paradigm of flat field concave grating is given, it works between 190 nm to 410 nm, the diameter of the concave grating is 20 mm, and F/# is 0.21. The design result was analyzed and evaluated. It was showed that if the slit source, whose width is 50μm, is used to reconstruction, the theoretic resolution capacity is better than 3 nm.
