Abstract：This paper presents a method to detect and measure spectrum intensity from a laser plasma soft X-ray source. A Channel Electron Multiplier (CEM) and a caliberated silicon photodiode were used as detectors in this method, the former is a nonstandard detector and the latter is a standard one. Charge-sensitive preamplifiers were used for measuring total charges generated by detectors, and a monochromator with high resolution was employed as the spectrometer． The formulae to calculate spectrum intensity from laser plasma soft X-ray source was given, based on the known grating efficiency of the monochromator, CEM’s gain and responsivity of the silicon photodiode to photons.
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