Abstract：In this work the authors discussed the fabrication of NbN thin films deposited using two methods: reactive magnetron sputtering system and DC bias-voltage sputtering system. The thickness and the surface morphology of the thin films were measured and observed by SEM. The crystalloid structure was analyzed by X-ray diffraction(XRD). The authors also measured the critical temperature(Tc) of the thin films. The authors compared the characters of NbN thin films that the authors prepared through two methods. The results showed that the films the authors prepared were uniform, compact, well constructed and sing-phase FCC δ-NbN. It is shown that the deposition temperature and the flux of N2 have a strong effect on the preferred orientation, while the critical temperature of the films is influenced by the quality of the original vacuum.
Key words：Magnetron sputtering;DC bias-voltage sputtering;NbN;Critical temperature
[1] TESLA Collaboration. Operating Experience with Superconducting Cavities at the TESLA Test Facility, in Proceedings of the 10th Workshop on RF Superconductivity, Tsukuba, Japan, 2001. 212. [2] Lutz Lilje. High Accelerating Gradients in 1.3 GHz Niobium Cavities, in Proceedings of the 10th Workshop on RF Superconductivity, Tsukuba, Japan, 2001. 287. [3] Hao Jian-kui et al. Recent Researches on RF Superconductivity in Peking University, in Proceedings of the 10th Workshop on RF Superconductivity, Tsukuba, Japan, 2001. 91. [4] Stark S et al. Niobium Sputtered-coated QWRs, in Proceedings of the 8th Workshop on RF Superconductivity, Padova, Italy, 1997. 1156. [5] Saito K. Behavior of Air Exposure of Medium <i>β</i>(=０.4５) Niobium SC Cavity, in Proceedings of the 10th Workshop on RF Superconductivity, Tsukuba, Japan, 2001. 588. [6] Saito K，Fujino T et al. Research and Development of Nb/Cu Clad Seamless Cavities at KEK, in Proceedings of the 10th Workshop on RF Superconductivity, Tsukuba, Japan, 2001. 524. [7] Knau H, Welti A et al. Sputtered NbN-Films for RF Applications，in Proceedings of Physica C: Superconductivity, Volume 182, Issues 1-3, 20 October, 1991. 39. [8] 太刀川恭治, 户叶一正. Superconductivity-Breakthrough of High Technology(超导-高技术的突破口). Beijing: Chemical Industry Press(北京：化学工业出版社), 1992. 40. [9] MENG Tie-jun, ZHAO Kui, WANG Li-fang et al(孟铁军, 赵 夔, 王莉芳等). Acta Physica Sinica(物理学报), 2003, 52(6): 1515.
