Ultraviolet Transmission Spectra of BCxN Thin Films
WANG Yu-xin1, 2, FENG Ke-cheng1, LI Ying-ai2, LI Wei-qing2, LIU Li-hua2, ZHAO Chun-hong2, ZHAO Yong-nian2
1. College of Science, Changchun University of Science and Technology, Changchun 130022, China 2. National Key Laboratory of Super-Hard Materials, Jilin University, Changchun 130012, China
Abstract：BCN, BC2N and BC3N thin films with transmission increasing properties in the ultraviolet region were deposited by RF magnetron sputtering with different sputtering power (80-130 W). Fourier transform infrared absorption and X-ray photoelectron spectroscopy results suggested that the films were atomic-level hybrids composed of B, C and N atoms. The compositions and transmission increasing properties of samples in the ultraviolet region were strongly influenced by sputtering power, which determined the transmission increasing properties in the ultraviolet region by changing compositions. And the lower the atomic number of C in the thin films, the better the transmission increasing properties in the ultraviolet region. The BCN thin films deposited at the sputtering power of 110 W possessed the lowest atomic number of C and the best transmission increasing properties in the ultraviolet region. And the increase in average transmissivity from 200 to 350 nm was about 40% compared with glass.
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