激光锡等离子体极紫外光源发射光谱诊断研究

胡桢麟^1,², 王天泽^1,², 何梁^1,², 林楠^1,^2,^*, 冷雨欣^1,², 陈卫标³

Research on Emission Spectrum Diagnosis of Laser-Produced Tin Plasma Extreme Ultraviolet Source

HU Zhen-lin^1,², WANG Tian-ze^1,², HE Liang^1,², LIN Nan^1,^2,^*, LENG Yu-xin^1,², CHEN Wei-biao³

Sn等离子体的(a)转换效率和(b)光谱纯度随激光峰值功率密度的变化趋势