磁场增强型高通量辉光放电溅射源的设计与研究

沈懿璇^1,², 万真真^3,^*, 余兴^2,^4,^*, 王海舟^2,^4,^*, 王永清³, 朱一妃^2,⁴, 刘少锋³

Design and Research of Magnetically Enhanced High-Throughput Glow Discharge Sputtering Source

SHEN Yi-xuan^1,², WAN Zhen-zhen^3,^*, YU Xing^2,^4,^*, WANG Hai-zhou^2,^4,^*, WANG Yong-qing³, ZHU Yi-fei^2,⁴, LIU Shao-feng³

旋转电机驱动下的磁感应强度分布 (a): 阴极表面0°; (b): 阴极表面45°; (c): 阴极表面90°