磁场增强型高通量辉光放电溅射源的设计与研究

沈懿璇^1,², 万真真^3,^*, 余兴^2,^4,^*, 王海舟^2,^4,^*, 王永清³, 朱一妃^2,⁴, 刘少锋³

Design and Research of Magnetically Enhanced High-Throughput Glow Discharge Sputtering Source

SHEN Yi-xuan^1,², WAN Zhen-zhen^3,^*, YU Xing^2,^4,^*, WANG Hai-zhou^2,^4,^*, WANG Yong-qing³, ZHU Yi-fei^2,⁴, LIU Shao-feng³

(a)有磁场电子运动轨迹的三维模拟结果; (b)有磁场电子运动轨迹的二维模拟结果; (c)无磁场电子运动轨迹的三维模拟结果; (d)旋转电机驱动永磁体旋转图