磁场增强型高通量辉光放电溅射源的设计与研究

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Design and Research of Magnetically Enhanced High-Throughput Glow Discharge Sputtering Source

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N48型烧结NdFeB永磁体的实际照片(a), 基于溅射源实际尺寸的简化几何模型(b),截面上的磁通密度分布(c), 相交线上的磁通密度分布(d)