基于光栅+傅里叶光谱的宽波段大角度光谱椭偏技术研究
张瑞1,2,*, 白沁1,2, 徐承雨1,2, 王赛飞1, 孔泉慧子1,2, 薛鹏1, 王志斌1

Study of Wide-Band and Large-Angle Spectral Ellipsometry Technique Based on Grating and Fourier Spectrometry
ZHANG Rui1,2,*, BAI Qin1,2, XU Cheng-yu1,2, WANG Sai-fei1, KONG Quan-huizi1,2, XUE Peng1, WANG Zhi-bin1
样机测得样片椭偏参量( Ψ , Δ )与波长的对应曲线(SiO2-Si样片, SiO2厚度 d =62.5 nm)