基于光栅+傅里叶光谱的宽波段大角度光谱椭偏技术研究
张瑞
1,
2,
*
, 白沁
1,
2
, 徐承雨
1,
2
, 王赛飞
1
, 孔泉慧子
1,
2
, 薛鹏
1
, 王志斌
1
Study of Wide-Band and Large-Angle Spectral Ellipsometry Technique Based on Grating and Fourier Spectrometry
ZHANG Rui
1,
2,
*
, BAI Qin
1,
2
, XU Cheng-yu
1,
2
, WANG Sai-fei
1
, KONG Quan-huizi
1,
2
, XUE Peng
1
, WANG Zhi-bin
1
原理样机实物图