Seya-Namioka类型真空紫外光谱系统的研制和性能测试
沈永才1, 钮雨凡1, 孔德峰2, 叶扬2,*, 张寿彪3, 李大创1, 谭名昇2, 黄艳清4, 赵志豪5, 訾鹏飞3, 张小辉5, 文斐3

Development and Performance Test of a Seya-Namioka Vacuum Ultraviolet Spectroscopy System
SHEN Yong-cai1, NIU Yu-fan1, KONG De-feng2, YE Yang2,*, ZHANG Shou-biao3, LI Da-chuang1, TAN Ming-sheng2, HUANG Yan-qing4, ZHAO Zhi-hao5, ZI Peng-fei3, ZHANG Xiao-hui5, WEN Fei3
微波等离子体光源在50~250 nm 波段光谱 (a): 50~100 nm; (b): 100~145 nm; (c): 145~195 nm; (d): 195~250 nm