大口径辅助阳极型辉光放电溅射源的设计与研究
万真真1, 武佳1, 施宁1,*, 王永清1,*, 刘少锋1, 沈懿璇2, 王海云1

Design and Research of Glow Discharge Excitation Source With Large Aperture Auxiliary Anode
WAN Zhen-zhen1, WU Jia1, SHI Ning1,*, WANG Yong-qing1,*, LIU Shao-feng1, SHEN Yi-xuan2, WANG Hai-yun1
辅助阳极设计原理 (a): 大口径传统阳极; (b): 增设辅助阳极结构