基于MEMS-FPI片上光谱芯片的多组分痕量气体检测系统
刘兆海1, 安昕辰1,3, 陶治1,2, 刘向1,2,*

Multicomponent Trace Gas Detecting and Identifying System Based on MEMS-FPI on-Chip Spectral Device
LIU Zhao-hai1, AN Xin-chen1,3, TAO Zhi1,2, LIU Xiang1,2,*
(a)光谱传感器内部封装结构; (b)可调滤波器驱动; (c)锁相放大器模块; (d)差分减法电路