轻元素荧光分析用多层膜分光晶体的制备与表征

王子乐, 张哲^*, 张云学, 项丝梦, 魏振博, 温圣优, 王占山

Fabrication and Characterization of Multilayer Analyzer Crystals for X-Ray Fluorescence Analysis on Light Elements

WANG Zi-le, ZHANG Zhe^*, ZHANG Yun-xue, XIANG Si-meng, WEI Zhen-bo, WEN Sheng-you, WANG Zhan-shan

AFM表面形貌测试结果 (a): Mo/B₄C多层膜; (b): Cr/C多层膜; (c): Cr/Sc多层膜; (d): W/B₄C多层膜( d =3.63 nm); (e): W/B₄C多层膜( d =2.85 nm)