高精度线扫式光谱共焦位移传感器光学系统设计
杨伟光1,2, 张周锋1,*, 齐美捷1, 闫佳悦1,2, 程默涵1,2

Optical System Design of High-Precision Line-Scanning Spectral Confocal Displacement Sensor
YANG Wei-guang1,2, ZHANG Zhou-feng1,*, QI Mei-jie1, YAN Jia-yue1,2, CHENG Mo-han1,2
点列图 (a): 500 nm点列图; (b): 550 nm点列图; (c): 600 nm点列图; (d): 650 nm点列图