光声光谱技术应用于痕量气体浓度测量的研究进展
郑洪全
, 戴景民
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Research Development of the Application of Photoacoustic Spectroscopy in Measurement of Trace Gas Concentration
ZHENG Hong-quan
, DAI Jing-min
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(a)PZT薄膜悬臂梁和桥式声传感器结构; (b)圆筒状压电换能器结构