光声光谱技术应用于痕量气体浓度测量的研究进展
郑洪全, 戴景民*

Research Development of the Application of Photoacoustic Spectroscopy in Measurement of Trace Gas Concentration
ZHENG Hong-quan, DAI Jing-min*
(a)PZT薄膜悬臂梁和桥式声传感器结构; (b)圆筒状压电换能器结构