CO<sub>2</sub>激光改性溶胶-凝胶SiO<sub>2</sub>薄膜光谱及紫外纳秒激光损伤特性研究

CO₂激光改性溶胶-凝胶SiO₂薄膜光谱及紫外纳秒激光损伤特性研究

袁凯欣, 卓瑾, 张清华, 李亚国^*

Study on the Spectral and Laser Damage Resistance of CO₂ Laser Modified Sol-Gel SiO₂ Thin Films

YUAN Kai-xin, ZHUO Jin, ZHANG Qing-hua, LI Ya-guo^*

(a)薄膜的傅里叶变换红外光谱; (b)—(d)分别为(a)虚线矩形区域内的放大图: (b)740~980 cm^-1, (c) 1 080~1 180 cm^-1和(d)1 160~1 300 cm^-1