CO<sub>2</sub>激光改性溶胶-凝胶SiO<sub>2</sub>薄膜光谱及紫外纳秒激光损伤特性研究

CO₂激光改性溶胶-凝胶SiO₂薄膜光谱及紫外纳秒激光损伤特性研究

袁凯欣, 卓瑾, 张清华, 李亚国^*

Study on the Spectral and Laser Damage Resistance of CO₂ Laser Modified Sol-Gel SiO₂ Thin Films

YUAN Kai-xin, ZHUO Jin, ZHANG Qing-hua, LI Ya-guo^*

在0~20 W激光功率范围内CO₂激光处理后薄膜的力学性能改善 (a): 弹性模量; (b): 硬度T₂和T₃样品的弹性模量和硬度随着CO₂激光功率增加而增大