CO<sub>2</sub>激光改性溶胶-凝胶SiO<sub>2</sub>薄膜光谱及紫外纳秒激光损伤特性研究

CO₂激光改性溶胶-凝胶SiO₂薄膜光谱及紫外纳秒激光损伤特性研究

袁凯欣, 卓瑾, 张清华, 李亚国^*

Study on the Spectral and Laser Damage Resistance of CO₂ Laser Modified Sol-Gel SiO₂ Thin Films

YUAN Kai-xin, ZHUO Jin, ZHANG Qing-hua, LI Ya-guo^*

(a)CO₂激光处理装置示意图; (b)激光扫描示意图; (c)激光光斑分布图